【 Standard (5μm) Filter Element "Unsigned" 】

Long life filter element for filtering harmful dust and impurities in the air.

【 Subminiature (0.3μm) Filter Element "Y" option 】

Effective separation of tar, carbon special filter element. (non-renewable)

[Long life of filter element]

The filter element adopts a unique chemical fiber structure (PAT.PEND) with a rough surface and a slimmer interior.

The blockage is greatly reduced and the life of the filter element is greatly improved. No FSM3 can correspond to the five gases of air, nitrogen, argon, carbon dioxide and mixture.

industry

Semiconductor manufacturing process (post-process)

Nitrogen cleaning associated element

Resin body type

One FSM3 can cope with air, nitrogen, argon, carbon dioxide and a mixture of five gases.

There are 4 kinds of joint quick insert bend pipe, quick insert straight pipe, screw in bend pipe and screw in straight pipe to choose from.

2 way valve can be directly connected, can save space. The needle valve with adjustable flow rate also saves space in the shape of the needle valve.

【 Stainless Steel body type 】

One FSM3 can cope with air, nitrogen, argon, carbon dioxide and a mixture of five gases.

Oxygen special oil specifications also have.

JXR joint type, 2 double sleeve joint type of 2 street and screw in a total of 3 options.

【 High precision? High response 】

The pressure loss is reduced by 50% compared with the old model due to the redesigned flow path.

The flow direction can be one-way (two kinds of forward and reverse) and three kinds of two-way.

Response time: 50msec

[IO-link enables factory automation]

IO-link corresponds to.

Transfer parameters and other activity data, predictable preservation.

Suitable for checking air leakage and air consumption. You have to worry about rust.